IEEE Madison Section - 2003 Meeting Archive
Institute of Electrical and Electronics Engineers

Photon-based Lithography: From DRAM to DNA chips, and beyond

Thursday, January 16, 2003, 11:45 AM - 1:00 PM

     Speaker: Franco Cerrina, Professor of Electrical and Computer Engineering,
              University of Wisconsin - Madison
    Location: Rocky Rococo's Pizza
              7952 Tree Lane (Madison Beltline Hwy. at Mineral Pt. Rd.), Ph 829-1444
        Menu: Pizza buffet, salad and soft drinks
 Lunch Price: $10.00 (free for UW-Madison Student Branch members)

RSVP by January 13th to Tom Yager via email or call 608.821.0821 ext. 342

Non-member guests are always welcome!

Lithography is the art of patterning a substrate, and has been developed mostly for application to semiconductors where it represents the work-horse of today’s manufacturing process. Several types of lithographic techniques have been introduced, spanning the range from the near ultraviolet to the X-rays. The main benefit of photon-based patterning techniques is in their intrinsic parallelism, so that millions of pixels can be transferred in a single flash. This allows the unsurpassed throughput of tens of wafer per hours that is required by the modern industry. Lithographic-based techniques have been developed in many other areas, from attempts to direct material modification by preferential epitaxial growth to the synthesis of 3-dimensional structures as in stereolithography; MEMS structures as well require somewhat different tools than the more advanced semiconductor production tools. These “exotic” approaches have met with variable success. While the semiconductor oriented lithography continues to develop, more recently other applications have emerged in the biological area. One of the most developed is the fabrication of the so-called DNA microarrays that are currently used for gene expression analysis, and other research and diagnostic application. This concept, pioneered by Affymetrix using a straight extension of contact lithography, has recently evolved to include direct maskless synthesis of DNA microarrays at NimbleGen Systems, probably the first commercially successful example of a photon-based maskless lithography. The requirements of biological lithography are considerably different from those of semiconductor techniques; for instance, the resolution needed is at most a few microns, but the contrast must exceed 1000-1500 in order to complete complex oligomers (n=40-100). Biological lithography can be used to build complex three-dimensional structures, either directly by synthesizing in-situ DNA and other molecules, or by building scaffolds for the attachment of selected molecules.

In this talk we will address the broad picture of optical lithography development, comparing trends in the development of optical-based lithographic tools with emphasis on the applications beyond semiconductor lithography.

Franco Cerrina is a Professor of Electrical and Computer Engineering at the University of Wisconsin-Madison. He is an IEEE and OSA Fellow, recipient of the SRC Aristotle award, and the director of the Center for Nano Technology. He earned his doctorate in Physics from the University of Rome in 1974 and joined the ECE Department in 1984. Since then, 23 students have graduated from his group.

His research interests are in the area of semiconductor processing and device fabrication, in particular lithography, and X-ray optics and technology. This research has a strong applied content and is currently focused on manufacturing technologies for the sub-100 mm ULSI electron devices, such as post-optical lithographies. More specifically, he is researching the application of X-rays to lithography for semiconductor manufacturing and to microscopy for materials and biological science. His activities include not only work with synchrotron X-rays, but also metrology, electron beam and extreme UV lithography (EUVL), and atomic force microscopy. Another focus of activity is in the computer modeling of optical systems (X-ray optics) and of semiconductor lithography, where his group has developed codes that are now worldwide standards.

Recently he has become interested in the application of microfabrication techniques to biological problems, and has developed a novel method for the rapid synthesis of DNA microarray chips. This technique is being commercialized.

He has published over 200 papers and holds several patents.

Research Interests:

Entrepreneurs Network Chapter

Thursday, February 20, 2003, 5:30 PM meet & register, 6:00 PM dinner (note time & location)

     Speaker: Gary L. Blank, Ph.D., Vice President, IEEE-USA
    Location: Quiveys Grove
              6261 Nesbitt Road (map at under "Contact Us"),
              Ph 273-4900
        Menu: menu to be determined
Dinner Price: approximately $20

RSVP by February 17th to Tom Yager via email or call 608.821.0821 ext. 342

Non-member guests are always welcome!

You are a consultant or considering becoming a consultant of engineering services - in simpler terms, a private practitioner. You are an IEEE member and you would like to be associated with other Consultants. Where do you go?

An IEEE Consultants' Network is an invaluable resource for consulting information. You will meet experienced practitioners as well as others new to consulting. Speakers discuss such topics as taxes, self-marketing, entrepreneurship, finances, fee setting, software and liability insurance. The network is also a source of potential clients.

There are active IEEE Consultants' Networks in thirty areas of the United States and others are in the formative stages.

Organizing a network can be exciting and rewarding. This talk describes how to start a Consultants' Network, and the benefits to the members and the Section.

Gary Blank received his B.S. from Illinois Institute of Technology, his M.S. from the University of Idaho, and his Ph.D. from the University of Wisconsin at the age of 24. All degrees are in electrical engineering. Since then his career has advanced along parallel paths in industry and in academia.

For many years he was a full-time consultant in industry while concurrently teaching part-time at the University of Florida and at UCLA.

He also held full-time faculty positions at Marquette University, Northern Illinois University, and Illinois Institute of Technology, while concurrently consulting part-time in industry.

Dr. Blank is the author of numerous published articles and papers. He is a Vice-President of IEEE-USA. He is a Senior Member of the IEEE. He is the founding chairman of the IEEE Consultants' Network of Chicago/Rockford. He was the National Chairman of the IEEE-USA AICN (Alliance of IEEE Consultants ' Networks) from 1998 to 2001, coordinating the activities of 30 Consultants ' Networks, and starting several new Networks. He was the Chairman of the IEEE Region 4 Student Activities Committee and the Chairman of the IEEE Region 4 Major Conferences Committee. He was a member of the Midcon Board of Directors and was the Convention Director for Midcon 1991. He was a member of the IEEE Educational Activities Board's Committee on the Engineering Skills Assessment Program. He is a member of the IEEE Individual Benefits and Services Committee. He is a national S-PAC speaker.

He is currently consulting full-time in industry in the areas of Control Systems, Digital Signal Processing, and Electronics. He teaches engineering courses live, and on home-study videos for review for both the PE Exam in Electrical and Computer Engineering and for the Fundamentals of Engineering (General Engineering) Exam. He also conducts seminars and workshops internationally on how to start and expand a successful consulting practice.

The TomoTherapy Process and Advanced Mechanical Design of TomoTherapy MachinesTomoTherapy Unit

Thursday, March 20, 2003, 11:45 AM - 1:00 PM

     Speaker: Richard Schmidt, Hardware Engineering Manager, TomoTherapy, Inc.
    Location: Rocky Rococo's Pizza
              7952 Tree Lane (Madison Beltline Hwy. at Mineral Pt. Rd.), Ph 829-1444
        Menu: Pizza buffet, salad and soft drinks
 Lunch Price: $10.00 (free for UW-Madison Student Branch members)

RSVP by March 17th to Tom Yager via email or call 608.821.0821 ext. 342

Non-member guests are always welcome!

TomoTherapy, Inc. has developed a revolutionary cancer treatment device that successfully integrates and improves the state of the art of the radiation therapy process. To the end user, the operation of this device is relatively simple, however accomplishing this requires the successful integration of several sophisticated electrical and mechanical sub-systems, such as: a high precision mechanical support structure (gantry), Linac beamline, solid state RF modulator, computer controlled radiation collimators, electrical slip-rings and an open axis rotating union.

This new device improves the patient registration (positioning) by imaging the patient in the same device in which the therapy is provided (Image Guided Radio-Therapy or IMRT). The treatment is improved by using a helical delivery utilizing a computer controlled multi-leaf collimator (MLC). Real-time dose is monitored via a detector located between the patient and the collimator system. Simulations of TomoTherapy treatments and comparisons to conventional treatments show that the Tomotherapy process can deliver more dose to the tumor while minimizing the dose to surrounding healthy tissue. It is also possible with a TomoTherapy machine to image the patient during treatment and perform dose reconstruction after the treatment.

Richard Schmidt is the Hardware Engineering Manager at TomoTherapy, Inc. In addition to playing a key role in several new technology development programs he supervises the work of all hardware engineers (electrical, mechanical, accelerator and standards). He has an undergraduate degree in Physics (UW '84) and a graduate degree in Mechanical Engineering (UW '00). He is a licensed Professional Engineer and has published research papers in Nuclear Physics and Medical Physics as well as a thesis on Free-Piston Engine Development.

Joint Meeting with UW-Madison Student Branch

Developing Software for Life Support Systems

Thursday, April 17, 2003, 5:30 PM - 8:00 PM

     Speaker: Paul Pienkowski, Engineering Director of R & D, Datex-Ohmeda
    Location: Tong Auditorium, Engineering Centers Building,
              1550 Engineering Drive - parking in lot 17 (see map)
        Menu: Pizza and soft drinks - free!

RSVP by April 14th to Tom Yager via email or call 608.225.3913

Non-member guests are always welcome!

The presentation will be held in the new Engineering Centers Building on the Engineering campus.

Engineering Building location map  

   36. Engineering Centers Building (G9)
   37. Engineering Hall (H10)
   38. Engineering Research Building (H9)
   74. McClain Athletic Facility (H10)
   77. Mechanical Engineering Building (H9)
  131. Union South (I10)
  143. Wendt Library (H11)
  151. 1410 Engineering Dr. (H10)

IEEE Entrepreneurs Network Affinity Group: Edgewood College Tour / Entrepreneurship and Consulting - Some Realistic Perspectives

Wednesday, April 30, 2003, 5:30 PM registration, 5:45-7:00 PM tour, 7:00 PM dinner, 7:30 PM presentation

     Speaker: Edgewood College staff/Eric S. Brown, PhD, Management Consultant
    Location: Edgewood College, Washburn Room in Regina Hall.
              Park in the Edgewood High School lot - see map for details.
        Menu: Dinner buffet
Dinner Price: $15

RSVP by April 18th to Dennis Bahr via email or call 608.831.2310

Non-member guests are always welcome!

The meeting will start out with a tour of the new biology and chemistry laboratories at Edgewood College. The tour will be followed by a buffet dinner and a presentation by Eric S Brown, PhD.

Eric S. Brown, PhD, Management Consultant, has been consulting to companies in Dane County and throughout Wisconsin since 1985. He assists startups and growing companies in business planning and strategic planning, market analysis and marketing strategies, and locating financing. His clients include manufacturing, service and high tech companies in numerous industries. Since 1990 he has co-chaired Madison Area Business Consultants. He has taught courses for the UW Small Business Development Center and has published articles on a variety of business topics. His B.A. is from Swarthmore College and his Ph.D. is from the University of Wisconsin. He can be contacted at or at 608/274-3055.

The Right Products at the Right Time: Stories and Strategies from ETCETC Logo

Thursday, May 15, 2003, 11:45 AM - 1:00 PM

     Speaker: Fred Foster, Chief Executive Officer,
              ETC (Electronic Theatre Controls, Inc.)
    Location: Rocky Rococo's Pizza
              7952 Tree Lane (Madison Beltline Hwy. at Mineral Pt. Rd.),
        Menu: Pizza buffet, salad and soft drinks
 Lunch Price: $10.00 (free for UW-Madison Student Branch members)

RSVP by May 12th to Tom Yager via email or call 608.225.3913

Non-member guests are always welcome!

Among the greatest challenges of product development is knowing when (and if) the market is ready for a new product, and then meeting the development time line on budget. As a company that has risen steadily over 27 years to become the dominant player in the entertainment-lighting industry, ETC offers an ongoing historical case study in the dynamics of engineering and marketing new technologies.

Fred Foster is the founder and Chief Executive Officer of ETC (Electronic Theatre Controls, Inc.), a now international lighting manufacturer, headquartered in Middleton, with 500+ employees, offices worldwide, and 2002 revenues of 115 million dollars. Though not an engineer by training, Foster has spent many years playing around in the guts of various micro-processor-based lighting control consoles and lighting fixtures. He has led ETC's R&D efforts while forging the ambitious strategic visions of his market-dominant 27-year-old Middleton firm. Foster is a classic example of entrepreneurial success in the technological world: bold ideas paired with an even greater persistence.

While pursuing a degree in Lighting Design at UW-Madison (which he would cut short to start his lighting business), Foster became obsessed with an idea of creating a new lighting-control console. Foster had been a student of famed lighting designer Gilbert Helmsley at the UW and had traveled and worked with him on stage productions, including on Broadway. While operating high-priced mini-computer-based lighting control consoles, Foster assessed that the time for high tech micro-processor-based lighting control had arrived. He reasoned that systems could be made far better and more affordable than anything on the market at the time, and that he and his future-physicist brother Bill could reinvent a console themselves, in their basement. He was right.

From 1975 on, with Bill eventually going away to get his physics Ph.D., Foster signed on other talented co-workers and engineers. Foster aimed to one day see his ETC products at the pinnacle of American theater: the New York Metropolitan Opera. By the mid-90s, with smart acquisitions and the dogged development of award-winning lighting innovations, he would achieve and surpass that dream. ETC now has products and systems not only at the Met, but at the London Royal Opera, at Disney parks worldwide, national TV studios and film production centers, casinos, conference centers, churches, schools, restaurants, and even recently at the United Nations — where a beam of light from an ETC Source Four® illuminates the grand seal. The ETC Expression® console line has been the most popular in U.S. lighting history; ETC Sensor® dimming racks the #1 choice of touring shows; and the Source Four spotlight has become a theatrical 'household' name, beloved by lighting designers for its optical excellence and energy efficiency.

Last May Foster took his global vision its furthest yet when ETC acquired the respected German lighting firm transtechnik Lichtsysteme and made an imposing move for market share in Europe. ETC is now viewed as the dominant entertainment-lighting company in the North American market, with a formidable growing international market margin. To accommodate further expansion the company is building a new 250,000-square-foot international corporate headquarters in Middleton, which is scheduled for completion this December.

Though current business times are not for the faint of heart, Foster and his ETC team press ahead as they always have. In defiance of slowing trends in the overall global economy and skittishness in the industry, ETC has managed to recently post its two best shipping quarters ever.

Imago Logo3d Atomic-Scale Compositional Imaging With
Local Electrode Atom Probes

Thursday, September 18, 2003, 11:45 AM - 1:00 PM

     Speaker: Thomas F. Kelly, Chairman, Founder & Chief Technology Officer, Ph.D.,
              Imago Scientific Instruments Corp.
    Location: Rocky Rococo's Pizza
              7952 Tree Lane (Madison Beltline Hwy. at Mineral Pt. Rd.),
        Menu: Pizza buffet, salad and soft drinks
 Lunch Price: $10.00 (free for UW-Madison Student Branch members)

RSVP by September 15th to Tom Yager via email or call 608.225.3913

Non-member guests are always welcome!

Historically, atom probes have been applied mostly to needle-shaped metal specimens by a small number of experts in the world. This is all changing. With our recent developments in Local Electrode Atom Probes (LEAP™), three-dimensional (3D) atomic-scale compositional images may be obtained from planar thin-film specimens by non-experts. Furthermore, the data collection rates for three-dimensional images are over 100 times faster than current instruments. Typical images require minutes to acquire and 100 nm wide images are common. These two advances mean that much larger volumes of material may be accessed with a LEAP than has previously been possible with atom probes. LEAP technology also provides high mass resolution of better than 1 part in 500.

Several examples of applications from our work will be shown. Many other advantages of LEAP technology for materials studies will be presented. For example, the LEAP™ is also designed for ease of operation by non-experts. These developments suggest that these new atom probes can be applied to a wide range of materials including magnetic storage and semiconductor applications, metals, and possibly organic materials.

A professor of materials science and engineering in the UW-Madison College of Engineering until September 2001, Tom Kelly took a sabbatical and founded a company around the atom probe microscope-a technology that enables researchers to view and analyze materials such as computer chips at the atomic scale. His invention, the Local Electrode Atom Probe, or LEAP, uses a high electrical field to capture an atom-by-atom "picture" of a material and render that image on a computer screen in 3D.

Thomas F. Kelly received his Bachelor of Science in Mechanical Engineering with highest honors from Northeastern University in June 1977. He then entered graduate school at the Massachusetts Institute of Technology and received a Ph.D. in Materials Science in December 1981. After one year as a postdoctoral associate at M.I.T., he joined the faculty of the Department of Metallurgical and Mineral Engineering of the University of Wisconsin-Madison in January 1983. He was a Full Professor from 1994 until his departure from the renamed Department of Materials Science and Engineering. Tom was also Director of the Materials Science Center from 1992 to 1999.

Tom Kelly has been active in the fields of analytical electron microscopy, atom probe microscopy, rapidly solidified materials, and electronic and superconducting materials for over 25 years. He has published over 100 papers and 5 patents in these fields in that time. Dr. Kelly is an authority on microstructural characterization. He is expert in most forms of transmission electron microscopy, scanning electron microscopy, and atom probe microscopy and has brought innovations to the instrumentation and practice. Tom is currently Vice President of the International Field Emission Society and has just served a three year term as Director of the Microscopy Society of America.

IEEE Consultants and Entrepreneurs Network: Wisconsin Innovation Service CenterWISC Logo

Tuesday, September 23, 2003, 6:00 PM - 8:30 PM

     Speaker: Ms. Milissa Rick, Marketing Director,
              Wisconsin Innovation Service Center
              at the University of Wisconsin - Whitewater.
    Location: Bavaria Family Restaurant
              7457 Elmwood Avenue, Middleton, WI.
        Menu: order off the menu
Dinner Price: menu price + 15% gratuity

RSVP by September 19th to Dennis Bahr via email or call 608.831.2310

Non-member guests are always welcome!

The Wisconsin Innovation Service Center (WISC) specializes in new product and invention assessments and market expansion opportunities for innovative manufacturers, technology businesses, and independent inventors. Since 1980, WISC has researched the viability of over 6,000 projects. Technical experts and researchers use an extensive array of resources to analyze information on technical feasibility, existing patents, market size, competitive intensity, demand trends, and other areas. WISC's research products cover product feasibility, competitive intelligence, distributor assessment, customer satisfaction, and licensing partnerships.

Milissa Rick has counseled over 2,000 innovative manufacturers, technology businesses, and entrepreneurs on new product and market development opportunities, specializing in competitive intelligence, customer and distributor assessments. She has successfully managed and marketed the Turning Ideas Into Profits Conference series, which consistently attracts a national participant base and continues to receive rave reviews. She has taught several workshops on early stage market research at a national level and an undergraduate course on new product development. She holds an MBA in Marketing from UWW.

Note: Dinner will be ordered off of the menu and payment made to the IEEE Madison Section at the meeting. Please add a 15% gratuity when paying. If you sign up and don't show up, the IEEE Section will still be charged since we are getting the room for free.

LIVE logoWeather Central

Thursday, October 30, 2003, 11:45 AM - 1:00 PM (note date change)

     Speaker: Ben Zimmerman, Weather Central
    Location: Rocky Rococo's Pizza
              7952 Tree Lane (Madison Beltline Hwy. at Mineral Pt. Rd.),
        Menu: Pizza buffet, salad and soft drinks
 Lunch Price: $10.00 (free for UW-Madison Student Branch members)

RSVP by October 27th to Tom Yager via email or call 608.225.3913

Non-member guests are always welcome!

Weather Central has been leading the television weather industry for the past 20 years by creating state-of-the-art weather data and presentation systems that are used by over 250 television stations in the U.S. Weather Central's latest presentation system, :LIVE, combines patented technologies with real-time "render to video" capabilities to create a new style of on air weather presentation in which the talent becomes an integral part of each scene. Ben will explain a few of Weather Central's technologies and discuss their development philosophy in what is sure to become an industry standard in the weather presentation arena.

Ben Zimmerman is a meteorologist and software product manager at Weather Central, Inc. in Madison, WI.

ATC logoAmerican Transmission Company

Thursday, November 20, 2003, 11:45 AM - 1:00 PM

     Speaker: Don Morrow, Director of Operations,
              American Transmission Company
    Location: Rocky Rococo's Pizza
              7952 Tree Lane (Madison Beltline Hwy. at Mineral Pt. Rd.),
        Menu: Pizza buffet, salad and soft drinks
 Lunch Price: $10.00 (free for UW-Madison Student Branch members)

RSVP by November 17th to Tom Yager via email or call 608.225.3913

Non-member guests are always welcome!

Donald J. Morrow is the director of system operations. Morrow oversees the day-to-day operation of the high-voltage electric transmission system that serves customers from the Upper Peninsula of Michigan to the Wisconsin-Illinois border. Morrow was previously the senior director of Madison Gas & Electric's Systems Operation Center, responsible for electric system operations and gas distribution monitoring. A registered professional engineer, Morrow graduated with honors from the University of Wisconsin-Madison with a BS degree in electrical engineering. He has served on numerous industry committees affiliated with the Mid-America Interconnected Network, the Mid-Continent Area Power Pool, North American Electric Reliability Council and Wisconsin Reliability Assessment Organization.

CNTech logoNanotechnology and X-ray Lithography at the UW-Madison Center for Nanotechnology

Thursday, December 18, 2003, 11:45 AM - 1:00 PM

     Speaker: Donald J. Thielman, Technical Manager,
              UW-Madison Center for Nanotechnology
    Location: Rocky Rococo's Pizza
              7952 Tree Lane (Madison Beltline Hwy. at Mineral Pt. Rd.),
        Menu: Pizza buffet, salad and soft drinks
 Lunch Price: $10.00 (free for UW-Madison Student Branch members)

RSVP by December 15th to Tom Yager via email or call 608.225.3913

Non-member guests are always welcome!

The Center for NanoTechnology is an interdisciplinary research center of the College of Engineering at the University of Wisconsin-Madison. The Center was established in 1984 to make use of the new electron storage ring, Aladdin, recently commissioned by the Synchrotron Radiation Center. The radiation emitted by this accelerator - soft x-rays - is important for technological applications in the semiconductor manufacturing area. CNTech was established to facilitate the development of this type of technology and its transfer to the U.S. industries. Begun with an initial seed grant from the Wisconsin Alumni Research Foundation (WARF), the Center is now a complete nanotechnology and X-ray lithography technology facility. It includes all the equipment and techniques for making masks, exposing wafers and inspecting the results of the exposures. This talk will cover a brief description of what nanotechnology is, the scale of things, and what research CNTech is doing in the nanotechnology arena.

Don has spent 25 years in instrumentation, aerospace and research at Rockwell-Collins, Nicolet Instruments, UW-Madison, Martin Marietta, University of Arizona, and Lockheed-Martin. His experience includes advanced digitizer design; flight control systems for helicopter and 757/767 autopilots; space instrumentation including Diffuse X-ray Spectrometer, Galileo Net Flux Radiometer, Huygens probe Descent Imager Spectral Radiometer to Saturn's moon Titan, and DS-1 and Mars missions. Don graduated ‘78 BS - EET from Milwaukee School of Engineering and is currently involved in X-ray and NGL lithography research.

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